Fully Automatic FOUP Cleaning System 'UPC-12500 SORA'
High quality, high throughput, and energy-saving! Compliant with SEMI standards, as well as UL and CE standards.
The "UPC-12500 SORA" is a fully automated FOUP cleaning system that has been improved with the concepts of high quality, high throughput, and energy efficiency, which are essential for modern semiconductor manufacturing. It complies with SEMI standards as well as CE standards. It is compatible with automated material handling systems (AMHS), and the communication protocol is compatible with GEM300, making it suitable for online management. 【Features】 ■ Improved throughput ■ Energy-saving measures ■ Space-efficient design ■ GEM300 compatibility ■ Enhanced maintainability *For more details, please refer to the PDF document or feel free to contact us.
- Company：ヒューグルエレクトロニクス
- Price：Other
